Thin Solid Films, Vol.518, No.22, 6522-6525, 2010
Synthesis and characterization of self-assembled ZnO nano-dots grown on SiNx/Si(001) substrates by radio frequency magnetron sputtering
This paper reports the synthesis and characterization of self-assembled ZnO nano-dots deposited on SiNx/Si (001) substrates by radio frequency magnetron sputtering. The effect of the working pressure on the microstructure of the as-grown ZnO thin films was examined. At a working pressure of 6 x 10(-3) Torr, a flat layered structure was dominant with a preferred orientation of the ZnO(0002) plane, while ZnO nanostructures were observed on the samples grown at 2 x 10(-2) Torr. This was attributed to the columnar growth that facilitated the nucleation of ZnO nano-structures on the growing surfaces. Hexagonal nano-pyramids were formed, which then transformed into nano-dots as the film became thicker. The ZnO nano-dots were uniform and well dispersed, exhibiting distinct photoluminescence spectra due to the quantum confinement effect. (C) 2010 Elsevier B.V. All rights reserved.