Previous Article Next Article Table of Contents Thin Solid Films, Vol.518, No.22, 6143-6144, 2010 DOI10.1016/j.tsf.2010.06.048 Export Citation The proceedings of the 2nd International Conference on Microelectronics and Plasma Technology - ICMAP 2009 Preface Lee NE Please enable JavaScript to view the comments powered by Disqus.