화학공학소재연구정보센터
Thin Solid Films, Vol.516, No.13, 4368-4373, 2008
A practical simulation scheme for slot-excited microwave plasma reactor equipped with dual shower plate
A two-dimensional fluid simulation code has been developed for self-consistent calculations of wave propagations, plasma transports, and gas phase chemical reactions in a microwave plasma reactor equipped with a dual shower plate type gas feeder for the material gas injection. In this code, wave propagation and resonant absorption in nonuniform plasmas, plasma transport, and generation and diffusion of radicals in the reactor with complex structures are considered. According to the simulation, the gas feeder divides the plasma into two regions: a plasma source and a diffusion regions, and it is effective to the improvement of uniformities near the stage. (c) 2007 Elsevier B.V. All rights reserved.