화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.32, No.2, 393-399, 2012
Investigation of Tin and Chromium Metal Plasmas by Langmuir Probe Measurements
Double Langmuir probe measurements are performed during the deposition of tin and chromium coatings in order to examine the degree of ionisation and the deviation from thermal equilibrium of these metal plasmas.