화학공학소재연구정보센터
검색결과 : 172건
No. Article
71 Photoresist ashing technology using N-2/O-2 ferrite-core ICP in the dual damascene process
Kim HW, Myung JH, Lee JW, Kim HS, Kim K, Jang JY, Yoon TH, Kim SK, Choi DK, Chung CW, Yeom GY, Myoung JM, Kim HJ
Journal of Materials Science, 41(15), 5040, 2006
72 Highly selective facilitated transport membranes for isoprene/n-pentane separation
Choi HW, Kim DB, Choi DK, Ahn BS, Kim HG, Kim HS, Lee CH, Sung JY
Journal of Membrane Science, 279(1-2), 403, 2006
73 KOH 첨착 활성탄에서 황화수소의 흡착 특성
최도영, 장성철, 공경택, 안병성,최대기
Journal of the Korean Industrial and Engineering Chemistry, 17(3), 280, 2006
74 Formation of nickel nanoparticles on amorphous silicon thin film and its effect on crystallization
Lee SB, Choi DK, Phillipp F, Kim YM, Kim YJ
Journal of Vacuum Science & Technology B, 24(3), 1405, 2006
75 Texture development and grain boundary faceting in an excimer laser-crystallized silicon thin film
Lee SB, Moon J, Chung CH, Kim YH, Lee JH, Choi DK
Journal of Vacuum Science & Technology B, 24(5), 2322, 2006
76 Zeolite 5A에서의 H2/CO/CO2 단성분 및 혼합성분의 흡착평형
안의섭, 장성철, 최도영, 김성현, 최대기
Korean Chemical Engineering Research, 44(5), 460, 2006
77 솔보써말 방법을 이용한 구리분말 제조 및 전자파 차폐제로의 응용
이효원, 김수룡, 권우택, 최덕균, 김영희
Korean Journal of Materials Research, 16(5), 285, 2006
78 Effects of an alternating field in field-aided lateral crystallization process for low temperature poly-silicon
Choi SH, Lee SB, Kim YW, Kim CK, Choi DK
Thin Solid Films, 503(1-2), 236, 2006
79 Study of ashing for low-k dielectrics using the N-2/O-2 ferrite-core inductively coupled plasmas
Kim HW, Myung JH, Kim NH, Lee HS, Park SG, Lee JG, Chung CW, Park WJ, Kang CJ, Yoo CG, Ko KH, Woo JH, Choi SD, Choi DK
Thin Solid Films, 506, 222, 2006
80 Effects of the electric field on the crystallization behaviors in field-aided lateral crystallization process
Wang YH, Wang LP, Tang BY, Choi DK
Thin Solid Films, 515(4), 2507, 2006