검색결과 : 73건
No. | Article |
---|---|
71 |
Preferential Sputtering of Silicon from Metal Silicides at Elevated-Temperatures Hedlund C, Carlsson P, Blom HO, Berg S, Katardjiev IV Journal of Vacuum Science & Technology A, 12(4), 1542, 1994 |
72 |
Microloading Effect in Reactive Ion Etching Hedlund C, Blom HO, Berg S Journal of Vacuum Science & Technology A, 12(4), 1962, 1994 |
73 |
Large-Area Selective Thin-Film Deposition by Bias Sputtering Berg S, Katardjiev IV, Nender C, Carlsson P Thin Solid Films, 241(1-2), 1, 1994 |