화학공학소재연구정보센터
검색결과 : 73건
No. Article
71 Preferential Sputtering of Silicon from Metal Silicides at Elevated-Temperatures
Hedlund C, Carlsson P, Blom HO, Berg S, Katardjiev IV
Journal of Vacuum Science & Technology A, 12(4), 1542, 1994
72 Microloading Effect in Reactive Ion Etching
Hedlund C, Blom HO, Berg S
Journal of Vacuum Science & Technology A, 12(4), 1962, 1994
73 Large-Area Selective Thin-Film Deposition by Bias Sputtering
Berg S, Katardjiev IV, Nender C, Carlsson P
Thin Solid Films, 241(1-2), 1, 1994