화학공학소재연구정보센터
검색결과 : 60건
No. Article
51 A mechanism for brightening - Linear stability analysis of the curvature-enhanced coverage model
McFadden GB, Coriell SR, Moffat TP, Josell D, Wheeler D, Schwarzacher W, Mallett J
Journal of the Electrochemical Society, 150(9), C591, 2003
52 Superconformal deposition by surfactant-catalyzed chemical vapor deposition
Josell D, Wheeler D, Moffat TP
Electrochemical and Solid State Letters, 5(3), C44, 2002
53 Superconformal Electrodeposition in vias
Josell D, Wheeler D, Moffat TP
Electrochemical and Solid State Letters, 5(4), C49, 2002
54 Superconformal electrodeposition using derivitized substrates
Moffat TP, Wheeler D, Witt C, Josell D
Electrochemical and Solid State Letters, 5(12), C110, 2002
55 Superconformal electrodeposition of silver in submicrometer features
Moffat TP, Baker B, Wheeler D, Bonevich JE, Edelstein M, Kelly DR, Gan L, Stafford GR, Chen PJ, Egelhoff WF, Josell D
Journal of the Electrochemical Society, 149(8), C423, 2002
56 Via filling by electrodeposition - Superconformal silver and copper and conformal nickel
Josell D, Baker B, Witt C, Wheeler D, Moffat TP
Journal of the Electrochemical Society, 149(12), C637, 2002
57 Superconformal electrodeposition of copper
Moffat TP, Wheeler D, Huber WH, Josell D
Electrochemical and Solid State Letters, 4(4), C26, 2001
58 Superconformal electrodeposition of copper (vol 4, pg C26, 2001)
Moffat TP, Wheeler D, Huber WH, Josell D
Electrochemical and Solid State Letters, 4(8), L5, 2001
59 A simple equation for predicting superconformal electrodeposition in submicrometer trenches
Josell D, Wheeler D, Huber WH, Bonevich JE, Moffat TP
Journal of the Electrochemical Society, 148(12), C767, 2001
60 Superconformal electrodeposition of copper in 500-90 nm features
Moffat TP, Bonevich JE, Huber WH, Stanishevsky A, Kelly DR, Stafford GR, Josell D
Journal of the Electrochemical Society, 147(12), 4524, 2000