검색결과 : 41건
No. | Article |
---|---|
41 |
Effect of deposition temperature, on thermal stability in high-density plasma chemical vapor deposition fluorine-doped silicon dioxide Cheng YL, Wang YL, Chen HW, Lan JL, Liu CP, Wu SA, Wu YL, Lo KY, Feng MS Journal of Vacuum Science & Technology A, 22(3), 494, 2004 |