검색결과 : 35건
No. | Article |
---|---|
31 |
Reaction of HF molecules with metal impurities on Si surfaces Hoshino T, Nishioka Y Journal of Chemical Physics, 110(14), 6947, 1999 |
32 |
Etching process of SiO2 by HF molecules Hoshino T, Nishioka Y Journal of Chemical Physics, 111(5), 2109, 1999 |
33 |
Theoretical and spectroscopic studies of gap-states at ultrathin silicon oxide/silicon interfaces Kubota T, Asano A, Nishioka Y, Kobayashi H Journal of Chemical Physics, 111(17), 8136, 1999 |
34 |
Octadecyltrichlorosilane self-assembled-monolayer islands as a self-patterned-mask for HF etching of SiO2 on Si Komeda T, Namba K, Nishioka Y Journal of Vacuum Science & Technology A, 16(3), 1680, 1998 |
35 |
Formation of periodic step and terrace structure on Si(100) surface during annealing in hydrogen diluted with inert gas Kumagai Y, Namba K, Komeda T, Nishioka Y Journal of Vacuum Science & Technology A, 16(3), 1775, 1998 |