화학공학소재연구정보센터
검색결과 : 370건
No. Article
361 Demonstration of deep (80 mu m) RIE etching of SIC for MEMS and MMIC applications
Sheridan DC, Casady JB, Ellis EC, Siergiej RR, Cressler JD, Strong RM, Urban WM, Valek WF, Seiler CF, Buhay H
Materials Science Forum, 338-3, 1053, 2000
362 Molding-based thin film patterning techniques for SiC surface micromachining
Song X, Guo S, Zorman CA, Wu CH, Yasseen AA, Mehregany M
Materials Science Forum, 338-3, 1141, 2000
363 Bulk micromachining of polycrystalline SiC using Si molds fabricated by deep reactive ion etching
Rajan N, Zorman CA, Mehregany M
Materials Science Forum, 338-3, 1145, 2000
364 Preliminary investigation of SiC on silicon for biomedical applications
Carter GE, Casady JB, Bonds J, Okhuysen ME, Scofield JD, Saddow SE
Materials Science Forum, 338-3, 1149, 2000
365 In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators
Kolesar ES, Ko SY, Howard JT, Allen PB, Wilken JM, Boydston NC, Ruff MD, Wilks RJ
Thin Solid Films, 377-378, 719, 2000
366 Through-mold electrodeposition using the uniform injection cell (UIC): Workpiece and pattern scale uniformity
Leith SD, Schwartz DT
Electrochimica Acta, 44(23), 4017, 1999
367 Development of a carbon-based lithium microbattery
Kinoshita K, Song X, Kim J, Inaba M
Journal of Power Sources, 81-82, 170, 1999
368 Thermally-actuated cantilever beam for achieving large in-plane mechanical deflections
Kolesar ES, Allen PB, Howard JT, Wilken JM, Boydston N
Thin Solid Films, 355-356, 295, 1999
369 Micro/nanomechanical characterization of ceramic films for microdevices
Li XD, Bhushan B
Thin Solid Films, 340(1-2), 210, 1999
370 Measurements of residual stresses in thin films using micro-rotating-structures
Zhang X, Zhang TY, Zohar Y
Thin Solid Films, 335(1-2), 97, 1998