| 21 |
The characteristics of thin film electroluminescent displays produced using sol-gel produced tantalum pentoxide and zinc sulfide
Kavanagh Y, Alam MJ, Cameron DC
Thin Solid Films, 447, 85, 2004 |
| 22 |
Sub-micron period grating structures in Ta2O5 thin oxide films patterned using UV laser post-exposure chemically assisted selective etching
Pissadakis S, Ikiades A, Tai CY, Sessions NP, Wilkinson JS
Thin Solid Films, 453-54, 458, 2004 |
| 23 |
Interface of tantalum oxide films on silicon by UV annealing at low temperature
Fang Q, Zhang JY, Wang ZM, Wu JX, O'Sullivan BJ, Hurley PK, Leedham TL, Davies H, Audier MA, Jimenez C, Senateur JP, Boyd IW
Thin Solid Films, 428(1-2), 248, 2003 |
| 24 |
Tantalum pentoxide obtained from TaNx and TaSi2 anodisation: an inexpensive and thermally stable high k dielectric
Duenas S, Castan E, Barbolla J, Kola RR, Sullivan PA
Solid-State Electronics, 45(8), 1441, 2001 |
| 25 |
Crystallization effects in oxygen annealed Ta2O5 thin films on Si
Dimitrova T, Arshak K, Atanassova E
Thin Solid Films, 381(1), 31, 2001 |
| 26 |
Ultrathin Ta2O5 film growth by chemical vapor deposition of Ta(N(CH3)(2))(5) and O-2 on bare and SiOxNy-passivated Si(100) for gate dielectric applications
Son KA, Mao AY, Kim BY, Liu F, Pylant ED, Hess DA, White JM, Kwong DL, Roberts DA, Vrtis RN
Journal of Vacuum Science & Technology A, 16(3), 1670, 1998 |
