검색결과 : 26건
| No. | Article |
|---|---|
| 21 |
Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in Si (110) Tiggelaar RM, Berenschot JW, Elwenspoek MC, Gardeniers JGE, Dorsman R, Kleijn CR Journal of Vacuum Science & Technology B, 25(4), 1207, 2007 |
| 22 |
Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane Tong HD, Berg AHJV, Gardeniers JGE, Jansen HV, Gielens FC, Elwenspoek MC Thin Solid Films, 479(1-2), 89, 2005 |
| 23 |
Microfabricated palladium-silver alloy membranes and their application in hydrogen separation Tong HD, Gielens FC, Gardeniers JGE, Jansen HV, van Rijn CJM, Elwenspoek MC, Nijdam W Industrial & Engineering Chemistry Research, 43(15), 4182, 2004 |
| 24 |
Use of selective anodic bonding to create micropump chambers with virtually no dead volume Veenstra TT, Berenschot JW, Gardeniers JGE, Sanders RGP, Elwenspoek MC, van den Berg A Journal of the Electrochemical Society, 148(2), G68, 2001 |
| 25 |
Si-29-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions Nijdam AJ, van Veenendaal E, Gardeniers JGE, Kentgens APM, Nachtegaal GH, Elwenspoek M Journal of the Electrochemical Society, 147(6), 2195, 2000 |
| 26 |
Present and future role of chemical mechanical polishing in wafer bonding Gui C, Elwenspoek M, Gardeniers JGE, Lambeck PV Journal of the Electrochemical Society, 145(6), 2198, 1998 |