화학공학소재연구정보센터
검색결과 : 26건
No. Article
21 Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in Si (110)
Tiggelaar RM, Berenschot JW, Elwenspoek MC, Gardeniers JGE, Dorsman R, Kleijn CR
Journal of Vacuum Science & Technology B, 25(4), 1207, 2007
22 Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane
Tong HD, Berg AHJV, Gardeniers JGE, Jansen HV, Gielens FC, Elwenspoek MC
Thin Solid Films, 479(1-2), 89, 2005
23 Microfabricated palladium-silver alloy membranes and their application in hydrogen separation
Tong HD, Gielens FC, Gardeniers JGE, Jansen HV, van Rijn CJM, Elwenspoek MC, Nijdam W
Industrial & Engineering Chemistry Research, 43(15), 4182, 2004
24 Use of selective anodic bonding to create micropump chambers with virtually no dead volume
Veenstra TT, Berenschot JW, Gardeniers JGE, Sanders RGP, Elwenspoek MC, van den Berg A
Journal of the Electrochemical Society, 148(2), G68, 2001
25 Si-29-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions
Nijdam AJ, van Veenendaal E, Gardeniers JGE, Kentgens APM, Nachtegaal GH, Elwenspoek M
Journal of the Electrochemical Society, 147(6), 2195, 2000
26 Present and future role of chemical mechanical polishing in wafer bonding
Gui C, Elwenspoek M, Gardeniers JGE, Lambeck PV
Journal of the Electrochemical Society, 145(6), 2198, 1998