화학공학소재연구정보센터
검색결과 : 34건
No. Article
21 Internal stress in Cat-CVD microcrystalline Si : H thin films
Sahu L, Kale N, Kulkarni N, Pinto R, Dusane RO, Schroder B
Thin Solid Films, 501(1-2), 117, 2006
22 Effect of H-2 dilution on Cat-CVD a-SiC : H films
Swain BP, Rao TKG, Roy M, Gupta J, Dusane RO
Thin Solid Films, 501(1-2), 173, 2006
23 One-dimensional simulation study of micro crystalline silicon thin films for solar cell and thin film transistor applications using AMPS-1D
Tripathi S, Venkataramani N, Dusane RO, Schroeder B
Thin Solid Films, 501(1-2), 295, 2006
24 Potential of Cat-CVD deposited a-SiC : H as diffusion barrier layer on low-k HSQ films for ULSI
Singh SK, Kumbhar AA, Kothari M, Dusane RO
Thin Solid Films, 501(1-2), 318, 2006
25 Enhancement of moisture resistance of spin-on low-k HSQ films by hot wire generated atomic hydrogen treatment
Kumbhar AA, Singh SK, Dusane RO
Thin Solid Films, 501(1-2), 329, 2006
26 Highly conducting doped poly-Si deposited by hot wire CVD and its applicability as gate material for CMOS devices
Patil SB, Vairagar AV, Kumbhar AA, Sahu LK, Rao VR, Venkatramani N, Dusane RO, Schroeder B
Thin Solid Films, 430(1-2), 63, 2003
27 Revisiting the B-factor variation in a-SiC : H deposited by HWCVD
Swain BP, Patil SB, Kumbhar A, Dusane RO
Thin Solid Films, 430(1-2), 186, 2003
28 Nitrogen dilution effects on structural and electrical properties of hot-wire-deposited a-SiN : H films for deep-sub-micron CMOS technologies
Waghmare PC, Patil SB, Kumbhar AA, Rao R, Dusane RO
Thin Solid Films, 430(1-2), 189, 2003
29 Preliminary results on a-SiC : H based thin film light emitting diode by hot wire CVD
Patil SB, Kumbhar AA, Saraswat S, Dusane RO
Thin Solid Films, 430(1-2), 257, 2003
30 Influence of atomic hydrogen on the growth kinetics of a-Si : H films and on the properties of silicon substrates
Seitz H, Bauer S, Dusane RO, Schroder B
Thin Solid Films, 395(1-2), 116, 2001