화학공학소재연구정보센터
검색결과 : 31건
No. Article
21 Formation of high conductivity WSix layer and its characterization as a gate electrode
Byun JS, Lee BH, Park JS, Sohn DK, Choi SJ, Kim JJ
Journal of the Electrochemical Society, 145(9), 3228, 1998
22 Dopant effects on lateral silicide growth in self-aligned titanium silicide process
Park JS, Byun JS, Sohn DK, Lee BH, Park JW, Kim JJ
Journal of the Electrochemical Society, 145(10), 3585, 1998
23 Selective titanium silicide deposition using SiH4-TiCl4-H-2 low-pressure chemical vapor deposition and film characterization
Byun JS, Choi SJ, Kim JJ, Choi JT, Swenberg J, Achutharaman R
Journal of the Electrochemical Society, 145(11), 3941, 1998
24 Effect of Deposition Temperature and Sputtering Ambient on in-Situ Cobalt Silicide Formation
Byun JS, Park JS, Kim JJ
Journal of the Electrochemical Society, 144(9), 3175, 1997
25 Characterization of the Dopant Effect on Dichlorosilane-Based Tungsten Silicide Deposition
Byun JS, Lee BH, Park JS, Kim JJ
Journal of the Electrochemical Society, 144(10), 3572, 1997
26 The effects of screen oxide and low temperature BPSG anneal on titanium salicide formation
Lee KN, Ahn JG, Hwang H, Byun JS, Lee YJ
Thin Solid Films, 308-309, 585, 1997
27 Defect Generation During Epitaxial CoSi2 Formation Using Co/Ti Bilayer on Oxide Patterned (100)Si Substrate and Its Effect on the Electrical-Properties
Byun JS, Seon JM, Youn KS, Hwang HS, Park JW, Kim JJ
Journal of the Electrochemical Society, 143(3), L56, 1996
28 Epitaxial C49-TiSi2 Formation on (100)Si Substrate Using TiNx and Its Electrical Characteristics as a Shallow Contact Metallization
Byun JS
Journal of the Electrochemical Society, 143(6), 1984, 1996
29 복사 열전달이 있는 반투명 경사 다공질층에서의 유체 안정성
박흥목, 변재식, 유기풍, 이건홍
HWAHAK KONGHAK, 33(3), 376, 1995
30 Layer Reversal of Co/Zr Bilayer and Epitaxial-Growth of CoSi2 Layer on Si(001) Substrate
Byun JS, Kim JJ, Kim WS, Kim HJ
Journal of the Electrochemical Society, 142(8), 2805, 1995