검색결과 : 28건
No. | Article |
---|---|
21 |
Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics Tsarfati T, van de Kruijs RWE, Zoethout E, Louis E, Bijkerk F Thin Solid Films, 518(24), 7249, 2010 |
22 |
Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography Tsarfati T, de Kruijs RWEV, Zoethout E, Louis E, Bijkerk F Thin Solid Films, 518(5), 1365, 2009 |
23 |
Improved temperature stability of Mo/Si multilayers by carbide based diffusion barriers through implantation of low energy CHx+ ions Alink LGAM, de Kruijs RWEV, Louis E, Bijkerk F, Verhoeven J Thin Solid Films, 510(1-2), 26, 2006 |
24 |
Nano-size crystallites in Mo/Si multilayer optics van de Kruijs RWE, Zoethout E, Yakshin AE, Nedelcu I, Louis E, Enkisch H, Sipos G, Mullender S, Bijkerk F Thin Solid Films, 515(2), 430, 2006 |
25 |
Interface roughness in Mo/Si multilayers Nedelcu I, de Kruijs RWEV, Yakshin AE, Tichelaar F, Zoethout E, Louis E, Enkisch H, Muellender S, Bijkerk F Thin Solid Films, 515(2), 434, 2006 |
26 |
Determination of crystallization as a function of Mo layer thickness in Mo/Si multilayers Abdali S, Gerward L, Yakshin AE, Louis E, Bijkerk F Materials Research Bulletin, 37(2), 279, 2002 |
27 |
Peak and Integrated reflectivity, wavelength and gamma optimization of Mo/Si, and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography Stuik R, Louis E, Yakshin AE, Gorts PC, Maas ELG, Bijkerk F, Schmitz D, Scholze F, Ulm G, Haidl M Journal of Vacuum Science & Technology B, 17(6), 2998, 1999 |
28 |
Fabrication and Analysis of Extreme-Ultraviolet Reflection Masks with Patterned W/C Absorber Bilayers Voorma HJ, Louis E, Koster NB, Bijkerk F, Zijlstra T, Degroot LE, Rousseeuw BA, Romijn J, Vanderdrift EW, Friedrich J Journal of Vacuum Science & Technology B, 15(2), 293, 1997 |