화학공학소재연구정보센터
검색결과 : 28건
No. Article
21 Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics
Tsarfati T, van de Kruijs RWE, Zoethout E, Louis E, Bijkerk F
Thin Solid Films, 518(24), 7249, 2010
22 Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography
Tsarfati T, de Kruijs RWEV, Zoethout E, Louis E, Bijkerk F
Thin Solid Films, 518(5), 1365, 2009
23 Improved temperature stability of Mo/Si multilayers by carbide based diffusion barriers through implantation of low energy CHx+ ions
Alink LGAM, de Kruijs RWEV, Louis E, Bijkerk F, Verhoeven J
Thin Solid Films, 510(1-2), 26, 2006
24 Nano-size crystallites in Mo/Si multilayer optics
van de Kruijs RWE, Zoethout E, Yakshin AE, Nedelcu I, Louis E, Enkisch H, Sipos G, Mullender S, Bijkerk F
Thin Solid Films, 515(2), 430, 2006
25 Interface roughness in Mo/Si multilayers
Nedelcu I, de Kruijs RWEV, Yakshin AE, Tichelaar F, Zoethout E, Louis E, Enkisch H, Muellender S, Bijkerk F
Thin Solid Films, 515(2), 434, 2006
26 Determination of crystallization as a function of Mo layer thickness in Mo/Si multilayers
Abdali S, Gerward L, Yakshin AE, Louis E, Bijkerk F
Materials Research Bulletin, 37(2), 279, 2002
27 Peak and Integrated reflectivity, wavelength and gamma optimization of Mo/Si, and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography
Stuik R, Louis E, Yakshin AE, Gorts PC, Maas ELG, Bijkerk F, Schmitz D, Scholze F, Ulm G, Haidl M
Journal of Vacuum Science & Technology B, 17(6), 2998, 1999
28 Fabrication and Analysis of Extreme-Ultraviolet Reflection Masks with Patterned W/C Absorber Bilayers
Voorma HJ, Louis E, Koster NB, Bijkerk F, Zijlstra T, Degroot LE, Rousseeuw BA, Romijn J, Vanderdrift EW, Friedrich J
Journal of Vacuum Science & Technology B, 15(2), 293, 1997