검색결과 : 29건
No. | Article |
---|---|
21 |
Atomic-force lithography with interferometric tip-to-substrate position metrology Moon EE, Kupec J, Mondol MK, Smith HI, Berggren KK Journal of Vacuum Science & Technology B, 25(6), 2284, 2007 |
22 |
Robust shadow-mask evaporation via lithographically controlled undercut Cord B, Dames C, Berggren KK Journal of Vacuum Science & Technology B, 24(6), 3139, 2006 |
23 |
Enhancing etch resistance of hydrogen slisesquioxane via postdevelop electron curing Yang JKW, Anant V, Berggren KK Journal of Vacuum Science & Technology B, 24(6), 3157, 2006 |
24 |
Pumped quantum systems: Immersion fluids of the future? Anant V, Radmark M, Abouraddy AF, Killian TC, Berggren KK Journal of Vacuum Science & Technology B, 23(6), 2662, 2005 |
25 |
Localization of metastable atom beams with optical standing waves : Nanolithography at the Heisenberg limit Johnson KS, Thywissen JH, Dekker NH, Berggren KK, Chu AP, Younkin R, Prentiss M Science, 280(5369), 1583, 1998 |
26 |
Demonstration of a nanolithographic technique using a self-assembled monolayer resist for neutral atomic cesium Berggren KK, Younkin R, Cheung E, Prentiss M, Black AJ, Whitesides GM, Ralph DC, Black CT, Tinkham M Advanced Materials, 9(1), 52, 1997 |
27 |
Self-Assembled Monolayers Exposed by Metastable Argon and Metastable Helium for Neutral Atom Lithography and Atomic-Beam Imaging Bard A, Berggren KK, Wilbur JL, Gillaspy JD, Rolston SL, Mcclelland JJ, Phillips WD, Prentiss M, Whitesides GM Journal of Vacuum Science & Technology B, 15(5), 1805, 1997 |
28 |
Nanofabrication using neutral atomic beams Thywissen JH, Johnson KS, Younkin R, Dekker NH, Berggren KK, Chu AP, Prentiss M, Lee SA Journal of Vacuum Science & Technology B, 15(6), 2093, 1997 |
29 |
Microlithography by Using Neutral Metastable Atoms and Self-Assembled Monolayers Berggren KK, Bard A, Wilbur JL, Gillaspy JD, Helg AG, Mcclelland JJ, Rolston SL, Phillips WD, Prentiss M, Whitesides GM Science, 269(5228), 1255, 1995 |