화학공학소재연구정보센터
검색결과 : 245건
No. Article
241 Quenching of Electron-Temperature and Electron-Density in Ionized Physical Vapor-Deposition
Dickson M, Qian F, Hopwood J
Journal of Vacuum Science & Technology A, 15(2), 340, 1997
242 Pattern Profile Control of Polysilicon in Magnetron Reactive Ion Etching
Kimizuka M, Ozaki Y
Journal of Vacuum Science & Technology B, 15(2), 221, 1997
243 Surface Modification and Functionalization of Polytetrafluoroethylene Films
Kang ET, Tan KL, Kato K, Uyama Y, Ikada Y
Macromolecules, 29(21), 6872, 1996
244 2-Photon Laser-Induced Fluorescence Measurements of Absolute Atomic-Hydrogen Densities and Powder Formation in a Silane Discharge
Czarnetzki U, Miyazaki K, Kajiwara T, Muraoka K, Okada T, Maeda M, Suzuki A, Matsuda A
Journal of Vacuum Science & Technology A, 12(3), 831, 1994
245 Diagnostics and Control of Radiofrequency Glow-Discharge
Mutsukura N, Fukasawa Y, Machi Y, Kubota T
Journal of Vacuum Science & Technology A, 12(6), 3126, 1994