화학공학소재연구정보센터
검색결과 : 13건
No. Article
11 Diagnostics and modeling of CH4-CO2 plasmas for nanosmooth diamond deposition: Comparison to experimental data
Gries T, Vandenbulcke L, de Persis S, Aubry O, Delfau JL
Journal of Vacuum Science & Technology B, 27(5), 2309, 2009
12 Emission spectroscopy, mass spectrometry, and kinetics in CH4-CO2 Plasmas used for diamond deposition
Met C, de Persis S, Vandenbulcke L, Aubry O, Delfau JL, Vovelle C, Lago V
Journal of the Electrochemical Society, 153(7), F127, 2006
13 Classical and dynamic analysis of gas phase reactivity - Influence of carbon precursor in the CVD of SiC
de Persis S, Teyssandier F, Thevenin D, Darabiha N
Journal of the Electrochemical Society, 151(4), C236, 2004