화학공학소재연구정보센터
검색결과 : 14건
No. Article
11 Calculation of surface potential and beam deflection due to charging effects in electron beam lithography
Lee Y, Lee W, Chun K
Journal of Vacuum Science & Technology B, 18(6), 3095, 2000
12 New three dimensional simulator for low energy (similar to 1 keV) electron beam systems
Lee Y, Lee W, Chun K, Kim H
Journal of Vacuum Science & Technology B, 17(6), 2903, 1999
13 Fabrication of Electron-Beam Microcolumn Aligned by Scanning Tunneling Microscope
Park JY, Choi HJ, Lee Y, Kang S, Chun K, Park SW, Kuk Y
Journal of Vacuum Science & Technology A, 15(3), 1499, 1997
14 Deep submicron resist profile simulation and characterization of electron beam lithography system for cell projection and direct writing
Ham YM, Lee C, Kim SH, Chun K
Journal of Vacuum Science & Technology B, 15(6), 2313, 1997