검색결과 : 14건
No. | Article |
---|---|
11 |
Calculation of surface potential and beam deflection due to charging effects in electron beam lithography Lee Y, Lee W, Chun K Journal of Vacuum Science & Technology B, 18(6), 3095, 2000 |
12 |
New three dimensional simulator for low energy (similar to 1 keV) electron beam systems Lee Y, Lee W, Chun K, Kim H Journal of Vacuum Science & Technology B, 17(6), 2903, 1999 |
13 |
Fabrication of Electron-Beam Microcolumn Aligned by Scanning Tunneling Microscope Park JY, Choi HJ, Lee Y, Kang S, Chun K, Park SW, Kuk Y Journal of Vacuum Science & Technology A, 15(3), 1499, 1997 |
14 |
Deep submicron resist profile simulation and characterization of electron beam lithography system for cell projection and direct writing Ham YM, Lee C, Kim SH, Chun K Journal of Vacuum Science & Technology B, 15(6), 2313, 1997 |