화학공학소재연구정보센터
검색결과 : 135건
No. Article
131 Commercialization of SCALPEL masks
Farrow RC, Novembre AE, Peabody M, Kasica R, Blakey M, Liddle JA, Werder K, DeMarco R, Ocola L, Rutberg L, Saunders T, Unruh J, Qian F, Smith M
Journal of Vacuum Science & Technology B, 16(6), 3582, 1998
132 Quenching of Electron-Temperature and Electron-Density in Ionized Physical Vapor-Deposition
Dickson M, Qian F, Hopwood J
Journal of Vacuum Science & Technology A, 15(2), 340, 1997
133 Application of Poly(Methyl Methacrylate) Ultrathin Resist Supported by a Flowing Subphase Method in Electron-Beam Fabrication of a 4 in High-Resolution Mask
Gu N, Qian F, Hong QY, Lu ZH, Wei Y, Yu XD, Peng L, Zhang ZG, Zhao LX, Zhang HP, Liu YK
Journal of Vacuum Science & Technology B, 15(1), 178, 1997
134 Characterization of Amorphous-Carbon Thin-Films
Capano MA, Mcdevitt NT, Singh RK, Qian F
Journal of Vacuum Science & Technology A, 14(2), 431, 1996
135 An Automatic Langmuir-Blodgett System Based on Flowing Subphase Compression
Lu ZH, Qian F, Zhu YM, Yang XM, Wei Y
Thin Solid Films, 243(1-2), 371, 1994