검색결과 : 113건
No. | Article |
---|---|
111 |
Simulation-Model to Very-Low Pressure Chemical-Vapor-Deposition of SiGe Alloy Gu SL, Wang RH, Zhang R, Zheng YD Journal of Vacuum Science & Technology A, 14(6), 3256, 1996 |
112 |
High Phosphorus Doping of Epitaxial Silicon at Low-Temperature and Very-Low Pressure Huang XD, Han P, Chen H, Zheng YD, Hu LQ, Wang RH, Zhu SM, Feng D Journal of Vacuum Science & Technology B, 14(4), 2690, 1996 |
113 |
Fabrication of Silicon Quantum Wires by Anisotropic Wet Chemical Etching and Thermal-Oxidation Liu JL, Shi Y, Wang F, Zhang R, Han P, Mao BH, Zheng YD Journal of Vacuum Science & Technology B, 13(5), 2137, 1995 |