화학공학소재연구정보센터
검색결과 : 113건
No. Article
111 Simulation-Model to Very-Low Pressure Chemical-Vapor-Deposition of SiGe Alloy
Gu SL, Wang RH, Zhang R, Zheng YD
Journal of Vacuum Science & Technology A, 14(6), 3256, 1996
112 High Phosphorus Doping of Epitaxial Silicon at Low-Temperature and Very-Low Pressure
Huang XD, Han P, Chen H, Zheng YD, Hu LQ, Wang RH, Zhu SM, Feng D
Journal of Vacuum Science & Technology B, 14(4), 2690, 1996
113 Fabrication of Silicon Quantum Wires by Anisotropic Wet Chemical Etching and Thermal-Oxidation
Liu JL, Shi Y, Wang F, Zhang R, Han P, Mao BH, Zheng YD
Journal of Vacuum Science & Technology B, 13(5), 2137, 1995