화학공학소재연구정보센터
검색결과 : 1,072건
No. Article
991 Improvement of GaAs metal-semiconductor field-effect transistor drain-source breakdown voltage by oxide surface passivation grown by atomic layer deposition
Ye PD, Wilk DG, Yang B, Chu SNG, Ng KK, Bude J
Solid-State Electronics, 49(5), 790, 2005
992 Evolution of materials technology for stacked-capacitors in 65 nm embedded-DRAM
Gerritsen E, Emonet N, Caillat C, Jourdan N, Piazza M, Fraboulet D, Boeck B, Berthelot A, Smith S, Mazoyer P
Solid-State Electronics, 49(11), 1767, 2005
993 A comparative study on lanthanide oxide thin films grown by atomic layer deposition
Paivasaari J, Putkonen M, Niinisto L
Thin Solid Films, 472(1-2), 275, 2005
994 Comparative study on electrical properties of atomic layer deposited high-permittivity materials on silicon substrates
Duenas S, Castan H, Garcia H, Barbolla J, Kukli K, Ritala M, Leskela M
Thin Solid Films, 474(1-2), 222, 2005
995 Comparison between ZnO films grown by atomic layer deposition using H2O or O-3 as oxidant
Kim SK, Hwang CS, Park SHK, Yun SJ
Thin Solid Films, 478(1-2), 103, 2005
996 Engineering structure and properties of hafnium oxide films by atomic layer deposition temperature
Kukli K, Aarik J, Uustare T, Lu J, Ritala M, Aidla A, Pung L, Harsta A, Leskela M, Kikas A, Sammelselg V
Thin Solid Films, 479(1-2), 1, 2005
997 Density functional theory study of initial stage of ZrO2 atomic layer deposition on Ge/Si(100)-(2 x 1) surface
Chen W, Zhang DW, Ren J, Lu HL, Zhang JY, Xu M, Wang JT, Wang LK
Thin Solid Films, 479(1-2), 73, 2005
998 Neodymium oxide and neodymium aluminate thin films by atomic layer deposition
Kosola A, Paivasaari J, Putkonen M, Niinisto L
Thin Solid Films, 479(1-2), 152, 2005
999 Stability behaviour of Cd-free Cu(In,Ga)Se-2 solar modules with In2S3 buffer layer prepared by atomic layer deposition
Spiering S, Hariskos D, Schroder S, Powalla M
Thin Solid Films, 480, 195, 2005
1000 Growth mechanism of TiN film on dielectric films and the effects on the work function
Choi K, Lysaght P, Alshareef H, Huffman C, Wen HC, Harris R, Luan H, Hung PY, Sparks C, Cruz M, Matthews K, Majhi P, Lee BH
Thin Solid Films, 486(1-2), 141, 2005