화학공학소재연구정보센터
검색결과 : 92건
No. Article
91 Alignment of a Multilayer-Coated Imaging-System Using Extreme-Ultraviolet Foucault and Ronchi Interferometric Testing
Raychaudhuri AK, Ng W, Cerrina F, Tan Z, Bjorkholm J, Tennant D, Spector SJ
Journal of Vacuum Science & Technology B, 13(6), 3089, 1995
92 Fabrication of Diffractive Optical-Components for an Extreme-Ultraviolet Shearing Interferometer
Spector SJ, Tennant DM, Tan Z, Bjorkholm JE
Journal of Vacuum Science & Technology B, 12(6), 3846, 1994