화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 AID of hafnium oxide thin film from tetrakis(ethylmethylamino)hafnium and ozone
Liu XY, Ramanathan S, Longdergan A, Srivastava A, Lee E, Seidel TE, Barton JT, Pang D, Gordon RG
Journal of the Electrochemical Society, 152(3), G213, 2005
2 ALD of hafnium oxide thin films from tetrakis(ethylmethylamino)hafnium and ozone (vol 152, pg G213, 2005)
Liu XY, Ramanathan S, Longdergan A, Srivastava A, Lee E, Seidel TE, Barton JT, Pang D, Gordon RG
Journal of the Electrochemical Society, 152(5), L9, 2005
3 Thin film atomic layer deposition equipment for semiconductor processing
Sneh O, Clark-Phelps RB, Londergan AR, Winkler J, Seidel TE
Thin Solid Films, 402(1-2), 248, 2002