검색결과 : 1건
No. | Article |
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1 |
Polycrystalline silicon thin films for MEMS applications Mahfoz-Kotb H, Salaun AC, Mohammed-Brahim T, Le Bihan F, El-Marssi M Thin Solid Films, 427(1-2), 422, 2003 |
No. | Article |
---|---|
1 |
Polycrystalline silicon thin films for MEMS applications Mahfoz-Kotb H, Salaun AC, Mohammed-Brahim T, Le Bihan F, El-Marssi M Thin Solid Films, 427(1-2), 422, 2003 |