검색결과 : 1건
No. | Article |
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1 |
Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD Vassallo E, Cremona A, Ghezzi F, Dellera F, Laguardia L, Ambrosone G, Coscia U Applied Surface Science, 252(22), 7993, 2006 |