화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Characterization of Zr-Si-N films deposited by cathodic vacuum arc with different N-2/SiH4 flow rates
Zhang GP, Niu EW, Wang XQ, Lv GH, Zhou L, Pang H, Huang J, Chen W, Yang SZ
Applied Surface Science, 258(8), 3674, 2012
2 Structure and optical properties of Zr1-xSixN thin films on sapphire
Zhang X, Byrne MS, Lad RJ
Thin Solid Films, 518(5), 1522, 2009
3 Influence of silicon on the microstructure and mechanical properties of Zr-Si-N composite films
Dong YS, Zhao WJ, Li YR, Li GY
Applied Surface Science, 252(14), 5057, 2006
4 Difference in high-temperature oxidation resistance of amorphous Zr-Si-N and W-Si-N films with a high Si content
Zeman P, Musil J
Applied Surface Science, 252(23), 8319, 2006
5 Structure and properties of magnetron sputtered Zr-Si-N films with a high (>= 25 at.%) Si content
Musil J, Daniel R, Zeman P, Takai O
Thin Solid Films, 478(1-2), 238, 2005
6 The characterization of Zr-Si-N diffusion barrier films with different sputtering bias voltage
Song ZX, Xu KW, Chen H
Thin Solid Films, 468(1-2), 203, 2004