화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Numerical investigation of the effect of heat shield shape on the oxygen impurity distribution at the crystal-melt interface during the process of Czochralski silicon crystal growth
Teng YY, Chen JC, Huang CC, Lu CW, Wun WT, Chen CY
Journal of Crystal Growth, 352(1), 167, 2012
2 Numerical simulation of oxygen transport during the CZ silicon crystal growth process
Chen JC, Teng YY, Wun WT, Lu CW, Chen HI, Chen CY, Lan WC
Journal of Crystal Growth, 318(1), 318, 2011