화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 The Effect of Aperturing on Radiation Damage-Induced Pattern Distortion of X-Ray Masks
Resnick DJ, Cummings KD, Dauksher WJ, Johnson WA, Seese PA, Chen HT, Wells GM, Engelstad R, Cerrina F
Journal of Vacuum Science & Technology B, 13(6), 3046, 1995
2 Radiation Damage-Induced Changes in Silicon-Nitride Membrane Mechanical-Properties
Wells GM, Chen HT, Wallace JP, Engelstad RL, Cerrina F
Journal of Vacuum Science & Technology B, 13(6), 3075, 1995
3 Accelerated Radiation-Damage Studies of Antireflection Materials on SiC X-Ray Mask Membrane
Shoki T, Ohkubo R, Kosuga H, Yamaguchi Y, Annaka N, Wells GM, Yamazaki K, Cerrina F
Journal of Vacuum Science & Technology B, 12(6), 3995, 1994
4 Synchrotron-Radiation X-Ray-Lithography Beamline Optics Alignment Using the Hartmann Method
Chen G, Yamazaki K, Waldo W, Welnak J, Wells GM, Cerrina F
Journal of Vacuum Science & Technology B, 12(6), 4013, 1994
5 X-Ray Mask Replication Using Square Synchrotron-Radiation Illumination
Reilly M, Wells GM, Guo J, Wallace JP, Edwards N, Cerrina F, Melngailis J
Journal of Vacuum Science & Technology B, 11(6), 2971, 1993
6 Evaluation of Beryllium Foils for X-Ray-Lithography Beamlines
Wells GM, Brodsky EL, Cerrina F, Waldo WG
Journal of Vacuum Science & Technology B, 11(6), 3008, 1993