검색결과 : 6건
No. | Article |
---|---|
1 |
The Effect of Aperturing on Radiation Damage-Induced Pattern Distortion of X-Ray Masks Resnick DJ, Cummings KD, Dauksher WJ, Johnson WA, Seese PA, Chen HT, Wells GM, Engelstad R, Cerrina F Journal of Vacuum Science & Technology B, 13(6), 3046, 1995 |
2 |
Radiation Damage-Induced Changes in Silicon-Nitride Membrane Mechanical-Properties Wells GM, Chen HT, Wallace JP, Engelstad RL, Cerrina F Journal of Vacuum Science & Technology B, 13(6), 3075, 1995 |
3 |
Accelerated Radiation-Damage Studies of Antireflection Materials on SiC X-Ray Mask Membrane Shoki T, Ohkubo R, Kosuga H, Yamaguchi Y, Annaka N, Wells GM, Yamazaki K, Cerrina F Journal of Vacuum Science & Technology B, 12(6), 3995, 1994 |
4 |
Synchrotron-Radiation X-Ray-Lithography Beamline Optics Alignment Using the Hartmann Method Chen G, Yamazaki K, Waldo W, Welnak J, Wells GM, Cerrina F Journal of Vacuum Science & Technology B, 12(6), 4013, 1994 |
5 |
X-Ray Mask Replication Using Square Synchrotron-Radiation Illumination Reilly M, Wells GM, Guo J, Wallace JP, Edwards N, Cerrina F, Melngailis J Journal of Vacuum Science & Technology B, 11(6), 2971, 1993 |
6 |
Evaluation of Beryllium Foils for X-Ray-Lithography Beamlines Wells GM, Brodsky EL, Cerrina F, Waldo WG Journal of Vacuum Science & Technology B, 11(6), 3008, 1993 |