화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Difference in high-temperature oxidation resistance of amorphous Zr-Si-N and W-Si-N films with a high Si content
Zeman P, Musil J
Applied Surface Science, 252(23), 8319, 2006
2 Fretting wear of sputtered W-Si-N coatings against steel
Gaspar MC, Ramalho A, Cavaleiro A
Materials Science Forum, 455-456, 510, 2004
3 Structural and mechanical properties of amorphous W-Si-N sputtered films after thermal annealing
Marques AP, Cavaleiro A
Thin Solid Films, 441(1-2), 150, 2003
4 Crystallographic and morphological characterization of reactively sputtered Ta, Ta-N and Ta-N-O thin films
Stavrev M, Fischer D, Wenzel C, Drescher K, Mattern N
Thin Solid Films, 307(1-2), 79, 1997