화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Surface modification and contamination characterization of ion-enhanced, implanted photoresist removal
Kawaguchi MN, Papanu JS, Chen HW, Su B, Verhaverbeke S
Journal of Vacuum Science & Technology B, 25(2), 459, 2007
2 The Etching Mechanisms of SiO2 in Hydrofluoric-Acid
Verhaverbeke S, Teerlinck I, Vinckier C, Stevens G, Cartuyvels R, Heyns MM
Journal of the Electrochemical Society, 141(10), 2852, 1994
3 Hydrogen Passivation of HF-Last Cleaned (100)Silicon Surfaces Investigated by Multiple Internal-Reflection Infrared-Spectroscopy
Bender H, Verhaverbeke S, Heyns MM
Journal of the Electrochemical Society, 141(11), 3128, 1994