검색결과 : 3건
No. | Article |
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1 |
In situ monitoring of GaN substrate surface in ICP containing energetic electrons Huang XJ, Guo Y, Zhang J, Nakano Y, Sugai H, Nakamura K Applied Surface Science, 292, 387, 2014 |
2 |
Reactive sputtering of ZnO/ZnO:Al contacts for chalcopyrite solar modules Koble C, Caballero R, Greiner D, Klaer J, Klenk R, Ruske F Thin Solid Films, 520(4), 1295, 2011 |
3 |
DC reactive sputtering of aluminium doped zinc oxide films for solar modules controlled by target voltage Koble C, Greiner D, Klaer J, Klenk R, Meeder A, Ruske F Thin Solid Films, 518(4), 1204, 2009 |