화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 In situ monitoring of GaN substrate surface in ICP containing energetic electrons
Huang XJ, Guo Y, Zhang J, Nakano Y, Sugai H, Nakamura K
Applied Surface Science, 292, 387, 2014
2 Reactive sputtering of ZnO/ZnO:Al contacts for chalcopyrite solar modules
Koble C, Caballero R, Greiner D, Klaer J, Klenk R, Ruske F
Thin Solid Films, 520(4), 1295, 2011
3 DC reactive sputtering of aluminium doped zinc oxide films for solar modules controlled by target voltage
Koble C, Greiner D, Klaer J, Klenk R, Meeder A, Ruske F
Thin Solid Films, 518(4), 1204, 2009