화학공학소재연구정보센터
검색결과 : 73건
No. Article
1 Strain control of GaN grown on Si substrates using an AlGaN interlayer
Deura M, Nakahara T, Momose T, Nakano Y, Sugiyama M, Shimogaki Y
Journal of Crystal Growth, 514, 65, 2019
2 Kinetic effects of methanol addition on supercritical fluid deposition of TiO2
Zhao Y, Jung K, Shimoyama Y, Shimogaki Y, Momose T
Journal of Supercritical Fluids, 138, 63, 2018
3 Experimental approach to estimate diffusivity of metal organics in supercritical CO2 at high temperatures
Zhao Y, Shimoyama Y, Momose T, Shimogaki Y
Journal of Supercritical Fluids, 120, 209, 2017
4 Analysis of the Gas Phase Kinetics Active during GaN Deposition from NH3 and Ga(CH3)(3)
Ravasio S, Momose T, Fujii K, Shimogaki Y, Sugiyama M, Cavallotti C
Journal of Physical Chemistry A, 119(28), 7858, 2015
5 Solubility of bis-(2,2,6,6-tetramethyl-3,5-heptanedionato)copper(II) in mixed supercritical CO2 and H-2 systems for application in supercritical fluid deposition of Cu
Momose T, Kondo A, Kamiya T, Yamada H, Ohara J, Kitamura Y, Uchida H, Shimogaki Y, Sugiyama M
Journal of Supercritical Fluids, 105, 193, 2015
6 Design of a Multi-Wafer Reactor for Supercritical Fluid Deposition of Cu in Mass Production: (1) Reaction Mechanism and Kinetics
Momose T, Sugiyama M, Kondoh E, Shimogaki Y
Journal of Chemical Engineering of Japan, 47(9), 737, 2014
7 Design of a Multi-Wafer Reactor for Supercritical Fluid Deposition of Cu in Mass Production: (2) Benchmarks for Single- and Multiple-Wafer Reactors
Momose T, Sugiyama M, Kondoh E, Shimogaki Y
Journal of Chemical Engineering of Japan, 47(9), 743, 2014
8 Kinetic study of alcohol-assisted supercritical fluid deposition of TiO2
Zhao Y, Jung K, Momose T, Shimogaki Y
Thin Solid Films, 553, 184, 2014
9 Strontium ruthenium oxide deposition in supercritical carbon dioxide using a closed reactor system
Jung K, Momose T, Shimogaki Y
Journal of Supercritical Fluids, 79, 244, 2013
10 One-Step Fabrication of Copper Thin Films on Insulators Using Supercritical Fluid Deposition
Uejima T, Momose T, Sugiyama M, Kondoh E, Shimogaki Y
Journal of the Electrochemical Society, 160(12), D3290, 2013