검색결과 : 1건
No. | Article |
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1 |
Nanofabrication with deep-ultraviolet lithography and resolution enhancements Fritze M, Palmateer S, Maki P, Knecht J, Chen CK, Astolfi D, Cann S, Denault S, Krohn K, Wyatt PW Journal of Vacuum Science & Technology B, 17(6), 3310, 1999 |