화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Surface chemistry and optimization of focused ion beam iodine-enhanced etching of indium phosphide
Callegari V, Nellen PM, Yang TH, Hauert R, Muller U, Hernandez-Ramirez F, Sennhauser U
Applied Surface Science, 253(22), 8969, 2007
2 Focused ion beam iodine-enhanced etching of high aspect ratio holes in InP photonic crystals
Callegari V, Nellen PM, Kaufmann J, Strasser P, Robin F
Journal of Vacuum Science & Technology B, 25(6), 2175, 2007