화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Self-organized nanomolecular films on low-dielectric constant porous methyl silsesquioxane at room temperature
Hu JC, Wu CW, Gau WC, Chen CP, Chen LJ, Li CH, Chang TC, Chu CJ
Journal of the Electrochemical Society, 150(4), F61, 2003
2 Metal-organic chemical vapor deposition of NbxTa(1-x)NyOmCn films as diffusion barriers for Cu metallization
Gau WC, Wu CW, Chang TC, Liu PT, Chu CJ, Chen CH, Chen LJ
Thin Solid Films, 420-421, 548, 2002
3 Copper electroplating for future ultralarge scale integration interconnection
Gau WC, Chang TC, Lin YS, Hu JC, Chen LJ, Chang CY, Cheng CL
Journal of Vacuum Science & Technology A, 18(2), 656, 2000
4 Copper electroplating for future ultralarge scale integration interconnection (vol 18, pg 656, 2000)
Gau WC, Chang TC, Lin YS, Hu JC, Chen LJ, Chang CY, Cheng CL
Journal of Vacuum Science & Technology A, 18(5), 2597, 2000