검색결과 : 1건
No. | Article |
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1 |
Optimization of Intermetal Dielectric Deposition Module Using Simulation Li JL, Mcvittie JP, Ferziger J, Saraswat KC, Dong J Journal of Vacuum Science & Technology B, 13(4), 1867, 1995 |
No. | Article |
---|---|
1 |
Optimization of Intermetal Dielectric Deposition Module Using Simulation Li JL, Mcvittie JP, Ferziger J, Saraswat KC, Dong J Journal of Vacuum Science & Technology B, 13(4), 1867, 1995 |