검색결과 : 1건
No. | Article |
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1 |
Process optimization of CF4/Ar plasma etching of Au using I-optimal design Kang TY, Kim G, Cho IH, Seo D, Hong SJ Thin Solid Films, 517(14), 3919, 2009 |
No. | Article |
---|---|
1 |
Process optimization of CF4/Ar plasma etching of Au using I-optimal design Kang TY, Kim G, Cho IH, Seo D, Hong SJ Thin Solid Films, 517(14), 3919, 2009 |