검색결과 : 1건
No. | Article |
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1 |
Optical Emission Imaging and Modeling Investigations of Microwave-Activated SiH4/H-2 and SiH4/CH4/H-2 Plasmas Mahoney EJD, Lalji AKSK, Allden JWR, Truscott BS, Ashfold MNR, Mankelevich YA Journal of Physical Chemistry A, 124(25), 5109, 2020 |