TY - JOUR PY - 2012 J2 - J. Electrochem. Soc. SN - 0013-4651 T2 - Journal of the Electrochemical Society VL - 159 IS - 6 DO - 10.1149/2.086206jes TI - Structural and Electrical Characterization of Lu2O3 Dielectric Layer for High Performance Analog Metal-Insulator-Metal Capacitors UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=953270 AU - Mondal S AU - Her JL AU - Shih SJ AU - Pan TM SP - H589 EP - H594 LA - English ER -