TY - JOUR PY - 2009 J2 - Appl. Surf. Sci. SN - 0169-4332 T2 - Applied Surface Science VL - 255 IS - 11 DO - 10.1016/j.apsusc.2009.01.043 TI - Low-temperature deposition of transparent conducting ZnO:Zr films on PET substrates by DC magnetron sputtering UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=759938 KW - Zirconium-doped zinc oxide KW - Polyethylene terephthalate KW - DC magnetron sputtering KW - Thin films AU - Zhang HF AU - Lei CX AU - Liu HF AU - Yuan CK SP - 6054 EP - 6056 LA - English ER -