TY - JOUR PY - 2003 J2 - Solid-State Electron. SN - 0038-1101 T2 - Solid-State Electronics VL - 47 IS - 8 DO - 10.1016/S0038-1101(03)00004-2 TI - Monte Carlo analysis of the implant dose sensitivity in 0.1 mu m NMOSFET UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=690209 KW - Monte Carlo analysis KW - transmission of moments KW - disposable spacer technique KW - statistical modeling KW - design of experiment KW - 0.1 mu m CMOs AU - Srinivasaiah HC AU - Bhat N SP - 1379 EP - 1383 LA - English ER -