TY - JOUR PY - 2005 J2 - Appl. Surf. Sci. SN - 0169-4332 T2 - Applied Surface Science VL - 252 IS - 2 DO - 10.1016/j.apsusc.2005.01.033 TI - Indium tin oxide thin films by bias magnetron rf sputtering for heterojunction solar cells application UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=642256 KW - rf sputtering KW - Indium tin oxide KW - negative bias KW - ion bombardment KW - heterojunction solar cell KW - textured surface AU - Zhao L AU - Zhou ZB AU - Peng H AU - Cui RQ SP - 385 EP - 392 LA - English ER -