TY - JOUR PY - 2000 J2 - Chem. Phys. Lett. SN - 0009-2614 T2 - Chemical Physics Letters VL - 329 IS - 3-4 DO - 10.1016/S0009-2614(00)01007-1 TI - Mechanism and energetics of dissociative adsorption of SiH3 on the hydrogen-terminated Si(001)-(2 x 1) surface UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=596548 AU - Walch SP AU - Ramalingam S AU - Aydil ES AU - Maroudas D SP - 304 EP - 310 LA - English ER -