TY - JOUR PY - 2004 J2 - J. Vac. Sci. Technol. B SN - 1071-1023 T2 - Journal of Vacuum Science & Technology B VL - 22 IS - 6 DO - 10.1116/1.1824952 TI - Full MEMS monolithic microcolumn for wafer-level arrayal UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=489734 AU - Kim H AU - Han C AU - Kim J AU - Kim H AU - Chun K SP - 2912 EP - 2916 LA - English ER -