TY - JOUR PY - 2001 J2 - J. Vac. Sci. Technol. B SN - 1071-1023 T2 - Journal of Vacuum Science & Technology B VL - 19 IS - 3 DO - 10.1116/1.1362682 TI - Molecular dynamics study of the interactions of small thermal and energetic silicon clusters with crystalline and amorphous silicon surfaces UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=341868 AU - Ramalingam S AU - Aydil ES AU - Maroudas D SP - 634 EP - 644 LA - English ER -