TY - JOUR PY - 1997 J2 - Thin Solid Films SN - 0040-6090 T2 - Thin Solid Films VL - 311 IS - 1-2 DO - 10.1016/S0040-6090(97)00398-2 TI - Application of high energy resolved X-ray emission spectroscopy for monitoring of silicide formation in Co/SiO2/Si system UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=275811 KW - ELECTRONIC-STRUCTURE KW - COSI2 KW - FILMS AU - Kurmaev EZ AU - Shamin SN AU - Galakhov VR AU - Kasko I SP - 28 EP - 32 LA - Multi-Language ER -