TY - JOUR PY - 1994 J2 - J. Vac. Sci. Technol. B SN - 1071-1023 T2 - Journal of Vacuum Science & Technology B VL - 12 IS - 6 DO - 10.1116/1.587417 TI - Accelerated Radiation-Damage Studies of Antireflection Materials on SiC X-Ray Mask Membrane UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=187628 AU - Shoki T AU - Ohkubo R AU - Kosuga H AU - Yamaguchi Y AU - Annaka N AU - Wells GM AU - Yamazaki K AU - Cerrina F SP - 3995 EP - 4000 LA - English ER -