TY - JOUR PY - 2021 J2 - Korean J. Mater. Res. SN - 1225-0562 T2 - Korean Journal of Materials Research VL - 31 IS - 12 DO - 10.3740/MRSK.2021.31.12.697 TI - Two-Facing-Targets (TFT) 스퍼터링장치를 이용하여 증착한 AlN박막의 잔류응력 측정 TI - Measurement of Residual Stress of AlN Thin Films Deposited by Two-Facing-Targets (TFT) Sputtering System UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1860455 KW - residual stress KW - AlN films KW - TFT sputtering system KW - columnar structure AU - 한창석 AU - 권용준 AU - Han CS AU - Kwon YJ SP - 697 EP - 703 LA - Multi-Language ER -