TY - JOUR PY - 2019 J2 - J. Process Control SN - 0959-1524 T2 - Journal of Process Control VL - 84 DO - 10.1016/j.jprocont.2019.08.006 TI - DeepVM: A Deep Learning-based approach with automatic feature extraction for 2D input data Virtual Metrology UR - https://www.cheric.org/research/tech/periodicals/view.php?seq=1791999 KW - Advanced Process Control KW - Convolutional Autoencoder KW - Deep Learning KW - Etching KW - Feature extraction KW - Industry 4.0 KW - Optical Emission Spectroscopy KW - Semiconductor Manufacturing KW - Soft sensor KW - Virtual Metrology AU - Maggipinto M AU - Beghi A AU - McLoone S AU - Susto GA SP - 24 EP - 34 LA - English ER -